A high-precision silicon-on-insulator position sensor.
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| Title: | A high-precision silicon-on-insulator position sensor. |
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| Authors: | Beck, Paul1,2, paul.beck@mpl.mpg.de, Wynne, Laura C.3, Iadanza, Simone4,5, O'Faolain, Liam4,5, Schulz, Sebastian A.3, Banzer, Peter1,2,6 |
| Source: | APL Photonics; Apr2023, Vol. 8 Issue 4, p1-7, 7p |
| Database: | Applied Science & Technology Source |
| ISSN: | 23780967 |
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| DOI: | 10.1063/5.0133968 |
