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A high-precision silicon-on-insulator position sensor.

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Title: A high-precision silicon-on-insulator position sensor.
Authors: Beck, Paul1,2, paul.beck@mpl.mpg.de, Wynne, Laura C.3, Iadanza, Simone4,5, O'Faolain, Liam4,5, Schulz, Sebastian A.3, Banzer, Peter1,2,6
Source: APL Photonics; Apr2023, Vol. 8 Issue 4, p1-7, 7p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 163421096
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: A high-precision silicon-on-insulator position sensor.
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  Data: <searchLink fieldCode="JN" term="%22APL+Photonics%22">APL Photonics</searchLink>; Apr2023, Vol. 8 Issue 4, p1-7, 7p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=163421096
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        Value: 10.1063/5.0133968
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        Text: English
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      – TitleFull: A high-precision silicon-on-insulator position sensor.
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              Text: Apr2023
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              Y: 2023
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