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Electrical characterization of thin silicon-on-insulator films doped by means of phosphorus end-terminated polymers.

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Bibliographic Details
Title:	Electrical characterization of thin silicon-on-insulator films doped by means of phosphorus end-terminated polymers.
Authors:	Pulici, Andrea^1,2, Kuschlan, Stefano^1,3, Seguini, Gabriele¹, gabriele.seguini@mdm.imm.cnr.it, Taglietti, Fabiana², Fanciulli, Marco^1,2, Chiarcos, Riccardo³, Laus, Michele³, Perego, Michele¹
Source:	Materials Science in Semiconductor Processing; Aug2023, Vol. 163, pN.PAG-N.PAG, 1p
Database:	Applied Science & Technology Source

Description
ISSN:	13698001
DOI:	10.1016/j.mssp.2023.107548