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Electrical characterization of thin silicon-on-insulator films doped by means of phosphorus end-terminated polymers.

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Title: Electrical characterization of thin silicon-on-insulator films doped by means of phosphorus end-terminated polymers.
Authors: Pulici, Andrea1,2, Kuschlan, Stefano1,3, Seguini, Gabriele1, gabriele.seguini@mdm.imm.cnr.it, Taglietti, Fabiana2, Fanciulli, Marco1,2, Chiarcos, Riccardo3, Laus, Michele3, Perego, Michele1
Source: Materials Science in Semiconductor Processing; Aug2023, Vol. 163, pN.PAG-N.PAG, 1p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 163947155
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Electrical characterization of thin silicon-on-insulator films doped by means of phosphorus end-terminated polymers.
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  Data: <searchLink fieldCode="JN" term="%22Materials+Science+in+Semiconductor+Processing%22">Materials Science in Semiconductor Processing</searchLink>; Aug2023, Vol. 163, pN.PAG-N.PAG, 1p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=163947155
RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.1016/j.mssp.2023.107548
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      – Code: eng
        Text: English
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      – TitleFull: Electrical characterization of thin silicon-on-insulator films doped by means of phosphorus end-terminated polymers.
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            NameFull: Pulici, Andrea
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            NameFull: Kuschlan, Stefano
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            NameFull: Seguini, Gabriele
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            NameFull: Taglietti, Fabiana
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            NameFull: Fanciulli, Marco
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            NameFull: Chiarcos, Riccardo
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            NameFull: Laus, Michele
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            – D: 15
              M: 08
              Text: Aug2023
              Type: published
              Y: 2023
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              Value: 163
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            – TitleFull: Materials Science in Semiconductor Processing
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