Fundamentals of thin film depth profiling by glow discharge optical emission spectroscopy.
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| Title: | Fundamentals of thin film depth profiling by glow discharge optical emission spectroscopy. |
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| Authors: | Vesel, Alenka1, Zaplotnik, Rok1, Primc, Gregor1, Mozetic, Miran1, miran.mozetic@guest.arnes.si |
| Source: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Jul2023, Vol. 41 Issue 4, p1-12, 12p |
| Database: | Applied Science & Technology Source |
| ISSN: | 07342101 |
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| DOI: | 10.1116/6.0002695 |
