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Fundamentals of thin film depth profiling by glow discharge optical emission spectroscopy.

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Title: Fundamentals of thin film depth profiling by glow discharge optical emission spectroscopy.
Authors: Vesel, Alenka1, Zaplotnik, Rok1, Primc, Gregor1, Mozetic, Miran1, miran.mozetic@guest.arnes.si
Source: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Jul2023, Vol. 41 Issue 4, p1-12, 12p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 164785010
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=164785010
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1116/6.0002695
    Languages:
      – Code: eng
        Text: English
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      Pagination:
        PageCount: 12
        StartPage: 1
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      – TitleFull: Fundamentals of thin film depth profiling by glow discharge optical emission spectroscopy.
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          Name:
            NameFull: Vesel, Alenka
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            NameFull: Zaplotnik, Rok
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            NameFull: Primc, Gregor
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            NameFull: Mozetic, Miran
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          Dates:
            – D: 01
              M: 07
              Text: Jul2023
              Type: published
              Y: 2023
          Identifiers:
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              Value: 07342101
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              Value: 41
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              Value: 4
          Titles:
            – TitleFull: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films
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