Phosphorus activation in silicon: To deglaze or not to deglaze, that is the question.
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| Title: | Phosphorus activation in silicon: To deglaze or not to deglaze, that is the question. |
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| Authors: | Barin, Gianluca1,2, Seguini, Gabriele1, Chiarcos, Riccardo3, Ospina, Viviana Maria3, Laus, Michele1,3, michele.laus@uniupo.it, Lenardi, Cristina2, Perego, Michele1, michele.perego@cnr.it |
| Source: | Materials Science in Semiconductor Processing; Oct2023, Vol. 165, pN.PAG-N.PAG, 1p |
| Database: | Applied Science & Technology Source |
| ISSN: | 13698001 |
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| DOI: | 10.1016/j.mssp.2023.107691 |
