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Effect of induced defects on conduction mechanisms of noble-gas-implanted ScN thin films.

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Bibliographic Details
Title: Effect of induced defects on conduction mechanisms of noble-gas-implanted ScN thin films.
Authors: Burcea, Razvan1, Bouteiller, Hugo1, Hurand, Simon1, Eklund, Per2, Barbot, Jean-François1, jean.francois.barbot@univ-poitiers.fr, le Febvrier, Arnaud2, arnaud.le.febvrier@liu.se
Source: Journal of Applied Physics; 8/7/2023, Vol. 134 Issue 5, p1-8, 8p
Database: Applied Science & Technology Source
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