A Low-Temperature Batch Process for the Deposition of High-Quality Conformal Alumina Thin Films for Electronic Applications.
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| Title: | A Low-Temperature Batch Process for the Deposition of High-Quality Conformal Alumina Thin Films for Electronic Applications. |
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| Authors: | Burwell, Gregory1,2, g.burwell@swansea.ac.uk, Rejnhard, Klaudia1,2, Evans, Jon2, Mitchell, Jacob2, Grimes, Michael T.3, Elwin, Matt2, Armin, Ardalan1,2, Meredith, Paul1,2, paul.meredith@swansea.ac.uk |
| Source: | Advanced Engineering Materials; Jun2023, Vol. 25 Issue 12, p1-12, 12p |
| Database: | Applied Science & Technology Source |
| ISSN: | 14381656 |
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| DOI: | 10.1002/adem.202201901 |
