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Yield Methodology and Heater Process Variation in Phase Change Memory (PCM) Technology for Analog Computing.

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Bibliographic Details
Title: Yield Methodology and Heater Process Variation in Phase Change Memory (PCM) Technology for Analog Computing.
Authors: Chan, Victor1, vchan@us.ibm.com, Gasasira, A.1, Pujari, R.1, Tseng, W.-T.1, Gordon, T.1, Southwick, R.1, Ok, I.1, Choi, S.1, Silvestre, C.1, Utomo, H.1, Brew, K.1, Philip, T.1, Burr, G. W.2, Saulnier, N.1, Teehan, S.1, Ahsan, I.1
Source: IEEE Transactions on Semiconductor Manufacturing; Aug2023, Vol. 36 Issue 3, p327-331, 5p
Database: Applied Science & Technology Source
Description
ISSN:08946507
DOI:10.1109/TSM.2023.3284313