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Yield Methodology and Heater Process Variation in Phase Change Memory (PCM) Technology for Analog Computing.

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Title: Yield Methodology and Heater Process Variation in Phase Change Memory (PCM) Technology for Analog Computing.
Authors: Chan, Victor1, vchan@us.ibm.com, Gasasira, A.1, Pujari, R.1, Tseng, W.-T.1, Gordon, T.1, Southwick, R.1, Ok, I.1, Choi, S.1, Silvestre, C.1, Utomo, H.1, Brew, K.1, Philip, T.1, Burr, G. W.2, Saulnier, N.1, Teehan, S.1, Ahsan, I.1
Source: IEEE Transactions on Semiconductor Manufacturing; Aug2023, Vol. 36 Issue 3, p327-331, 5p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 170043080
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Yield Methodology and Heater Process Variation in Phase Change Memory (PCM) Technology for Analog Computing.
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  Data: <searchLink fieldCode="JN" term="%22IEEE+Transactions+on+Semiconductor+Manufacturing%22">IEEE Transactions on Semiconductor Manufacturing</searchLink>; Aug2023, Vol. 36 Issue 3, p327-331, 5p
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        Value: 10.1109/TSM.2023.3284313
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        Text: English
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        PageCount: 5
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              Text: Aug2023
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