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Structure and Properties of Arc Ion Plating Deposited AlCrSiN Coatings Controlled by Pulsed Bias Voltage.

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Title: Structure and Properties of Arc Ion Plating Deposited AlCrSiN Coatings Controlled by Pulsed Bias Voltage.
Authors: Zhang, Rui1, zr94264@126.com, Liu, Yanmei1, ymliu@tute.edu.cn, Wang, Chongyang1, Cao, Fengting1, Fan, Qixiang1, Wang, Tiegang1, ymliu@tute.edu.cn
Source: Metals (2075-4701); Aug2023, Vol. 13 Issue 8, p1448, 14p
Database: Applied Science & Technology Source
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ISSN:20754701
DOI:10.3390/met13081448