Silicon diffusion in AlN.
Saved in:
| Title: | Silicon diffusion in AlN. |
|---|---|
| Authors: | Bonito Oliva, V.1,2, valeria.bonito-oliva@ikz-berlin.de, Mangelinck, D.3, Hagedorn, S.4, Bracht, H.5, Irmscher, K.1, Hartmann, C.1, Vennéguès, P.2, Albrecht, M.1 |
| Source: | Journal of Applied Physics; 9/7/2023, Vol. 134 Issue 9, p1-9, 9p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
|---|---|
| DOI: | 10.1063/5.0159641 |
