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Silicon diffusion in AlN.

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Title: Silicon diffusion in AlN.
Authors: Bonito Oliva, V.1,2, valeria.bonito-oliva@ikz-berlin.de, Mangelinck, D.3, Hagedorn, S.4, Bracht, H.5, Irmscher, K.1, Hartmann, C.1, Vennéguès, P.2, Albrecht, M.1
Source: Journal of Applied Physics; 9/7/2023, Vol. 134 Issue 9, p1-9, 9p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 171809469
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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RecordInfo BibRecord:
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      – Type: doi
        Value: 10.1063/5.0159641
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      – Code: eng
        Text: English
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        PageCount: 9
        StartPage: 1
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      – TitleFull: Silicon diffusion in AlN.
        Type: main
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            NameFull: Bonito Oliva, V.
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            NameFull: Mangelinck, D.
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            NameFull: Hagedorn, S.
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            NameFull: Bracht, H.
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            NameFull: Irmscher, K.
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            NameFull: Hartmann, C.
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            NameFull: Vennéguès, P.
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            NameFull: Albrecht, M.
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            – D: 07
              M: 09
              Text: 9/7/2023
              Type: published
              Y: 2023
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              Value: 134
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            – TitleFull: Journal of Applied Physics
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