Growth mechanism and characterization of chemical oxide films produced in peroxide mixtures on Si(100) surfaces
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| Title: | Growth mechanism and characterization of chemical oxide films produced in peroxide mixtures on Si(100) surfaces |
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| Authors: | Petitdidier, S.1, Bertagna, V.2, valerie.bertagna@univ-orleans.fr, Rochat, N.3, Rouchon, D.3, Besson, P.1, Erre, R.2, Chemla, M.4 |
| Source: | Thin Solid Films; Apr2005, Vol. 476 Issue 1, p51-58, 8p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00406090 |
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| DOI: | 10.1016/j.tsf.2004.09.008 |
