All-wet etched high-Q optical microcavity on a silicon chip.
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| Title: | All-wet etched high-Q optical microcavity on a silicon chip. |
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| Authors: | Zhi, Yanyan1, yanyanzhi@jnu.edu.cn, Liu, Li1, He, Yuting1, Zhang, Jiejun1, Li, Jie1, Zhang, Kun1, Zhang, Junkai1, Liu, Liling1, Zhang, Shu-Xin2, Yao, Jianping3, Guan, Bai-Ou1 |
| Source: | Applied Physics Letters; 12/18/2023, Vol. 123 Issue 25, p1-5, 5p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00036951 |
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| DOI: | 10.1063/5.0171764 |
