Effect of trimethylgallium flow rate on structural and photoelectronic properties of β-Ga2O3 films prepared by MOVPE.
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| Title: | Effect of trimethylgallium flow rate on structural and photoelectronic properties of β-Ga2O3 films prepared by MOVPE. |
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| Authors: | Mi, Wei1, Li, Bingkun1, Chen, Rongrong2, Luan, Caina2, Wang, Di1, 18253164706@163.com, He, Lin’an1, Zhou, Liwei1, Zhao, Jinshi1, jinshi58@163.com |
| Source: | Journal of Materials Science: Materials in Electronics; Jan2024, Vol. 35 Issue 3, p1-11, 11p |
| Database: | Applied Science & Technology Source |
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| ISSN: | 09574522 |
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| DOI: | 10.1007/s10854-024-11966-1 |