Impact of deposition temperature on electrical properties of HZO-based FeRAM.
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| Title: | Impact of deposition temperature on electrical properties of HZO-based FeRAM. |
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| Authors: | Yeh, Yu-Hsuan1, Tan, Yung-Fang2, Huang, Yen-Che2, Lin, Chao Cheng3, Wu, Chung-Wei1, Zhang, Yong-Ci2, Lee, Ya-Huan1, Chang, Ting-Chang4, tcchang3708@gmail.com, Sze, Simon M.5 |
| Source: | Journal of Applied Physics; 2/14/2024, Vol. 135 Issue 6, p1-6, 6p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/5.0184841 |
