View in EDS

Impact of deposition temperature on electrical properties of HZO-based FeRAM.

Saved in:
Bibliographic Details
Title: Impact of deposition temperature on electrical properties of HZO-based FeRAM.
Authors: Yeh, Yu-Hsuan1, Tan, Yung-Fang2, Huang, Yen-Che2, Lin, Chao Cheng3, Wu, Chung-Wei1, Zhang, Yong-Ci2, Lee, Ya-Huan1, Chang, Ting-Chang4, tcchang3708@gmail.com, Sze, Simon M.5
Source: Journal of Applied Physics; 2/14/2024, Vol. 135 Issue 6, p1-6, 6p
Database: Applied Science & Technology Source
FullText Text:
  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 175451349
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: Impact of deposition temperature on electrical properties of HZO-based FeRAM.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Yeh%2C+Yu-Hsuan%22">Yeh, Yu-Hsuan</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Tan%2C+Yung-Fang%22">Tan, Yung-Fang</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Huang%2C+Yen-Che%22">Huang, Yen-Che</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Lin%2C+Chao+Cheng%22">Lin, Chao Cheng</searchLink><relatesTo>3</relatesTo><br /><searchLink fieldCode="AU" term="%22Wu%2C+Chung-Wei%22">Wu, Chung-Wei</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Zhang%2C+Yong-Ci%22">Zhang, Yong-Ci</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Lee%2C+Ya-Huan%22">Lee, Ya-Huan</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Chang%2C+Ting-Chang%22">Chang, Ting-Chang</searchLink><relatesTo>4</relatesTo>, <i>tcchang3708@gmail.com</i><br /><searchLink fieldCode="AU" term="%22Sze%2C+Simon+M%2E%22">Sze, Simon M.</searchLink><relatesTo>5</relatesTo>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Journal+of+Applied+Physics%22">Journal of Applied Physics</searchLink>; 2/14/2024, Vol. 135 Issue 6, p1-6, 6p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=175451349
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1063/5.0184841
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 6
        StartPage: 1
    Titles:
      – TitleFull: Impact of deposition temperature on electrical properties of HZO-based FeRAM.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Yeh, Yu-Hsuan
      – PersonEntity:
          Name:
            NameFull: Tan, Yung-Fang
      – PersonEntity:
          Name:
            NameFull: Huang, Yen-Che
      – PersonEntity:
          Name:
            NameFull: Lin, Chao Cheng
      – PersonEntity:
          Name:
            NameFull: Wu, Chung-Wei
      – PersonEntity:
          Name:
            NameFull: Zhang, Yong-Ci
      – PersonEntity:
          Name:
            NameFull: Lee, Ya-Huan
      – PersonEntity:
          Name:
            NameFull: Chang, Ting-Chang
      – PersonEntity:
          Name:
            NameFull: Sze, Simon M.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 14
              M: 02
              Text: 2/14/2024
              Type: published
              Y: 2024
          Identifiers:
            – Type: issn-print
              Value: 00218979
          Numbering:
            – Type: volume
              Value: 135
            – Type: issue
              Value: 6
          Titles:
            – TitleFull: Journal of Applied Physics
              Type: main
ResultId 1