Measurement of spectral transmissivity of quartz plates used in rapid thermal processing.
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| Title: | Measurement of spectral transmissivity of quartz plates used in rapid thermal processing. |
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| Authors: | Zhang, Yang1, Sim, Hyo Jun1, Hwang, Jong Jin1, Lee, Hee-Lak1, Moon, Seung Jae1, smoon@hanyang.ac.kr |
| Source: | Optical Materials; Mar2024, Vol. 149, pN.PAG-N.PAG, 1p |
| Database: | Applied Science & Technology Source |
| ISSN: | 09253467 |
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| DOI: | 10.1016/j.optmat.2024.115028 |
