Ion Bombardment-Induced Stress Mechanism for the Formation of Ag Nanotwinned Films on Si Substrates.
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| Title: | Ion Bombardment-Induced Stress Mechanism for the Formation of Ag Nanotwinned Films on Si Substrates. |
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| Authors: | Chuang, Tung-Han1,2, tunghan@ntu.edu.tw, Lin, Ang-Ying1,3, Chen, Yen-Ting1, Chen, Yin-Hsuan1, Yang, Zi-Hong1, Wu, Po-Ching1,4 |
| Source: | Journal of Electronic Materials; May2024, Vol. 53 Issue 5, p2583-2590, 8p |
| Database: | Applied Science & Technology Source |
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| ISSN: | 03615235 |
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| DOI: | 10.1007/s11664-023-10905-w |
