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Medium Pressure Plasma Processing of Fused Silica: A Comparative Study for Material Removal Rate.

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Bibliographic Details
Title: Medium Pressure Plasma Processing of Fused Silica: A Comparative Study for Material Removal Rate.
Authors: Krishna, Enni1, Sreelakshmy, K.1, Dev, D. Sam Dayala1, Das, Manas2, manasdas@iitg.ac.in
Source: Plasma Chemistry & Plasma Processing; Mar2024, Vol. 44 Issue 2, p1069-1082, 14p
Database: Applied Science & Technology Source
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Description
ISSN:02724324
DOI:10.1007/s11090-023-10440-w