The Effect of Deposition Temperature on TiN Thin Films for the Electrode Layer of 3D Capacitors Prepared by Atomic Layer Deposition.
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| Title: | The Effect of Deposition Temperature on TiN Thin Films for the Electrode Layer of 3D Capacitors Prepared by Atomic Layer Deposition. |
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| Authors: | Chen, Xingyu1,2, Zhang, Jing2,3, Gao, Lingshan2, gaolingshan@mail.sic.ac.cn, Zhang, Faqiang2, Ma, Mingsheng2,3, Liu, Zhifu1,2,3, gaolingshan@mail.sic.ac.cn |
| Source: | Coatings (2079-6412); Jun2024, Vol. 14 Issue 6, p724, 14p |
| Database: | Applied Science & Technology Source |
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| ISSN: | 20796412 |
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| DOI: | 10.3390/coatings14060724 |
