View in EDS HTML Full Text PDF Full Text

The Effect of Deposition Temperature on TiN Thin Films for the Electrode Layer of 3D Capacitors Prepared by Atomic Layer Deposition.

Saved in:
Bibliographic Details
Title: The Effect of Deposition Temperature on TiN Thin Films for the Electrode Layer of 3D Capacitors Prepared by Atomic Layer Deposition.
Authors: Chen, Xingyu1,2, Zhang, Jing2,3, Gao, Lingshan2, gaolingshan@mail.sic.ac.cn, Zhang, Faqiang2, Ma, Mingsheng2,3, Liu, Zhifu1,2,3, gaolingshan@mail.sic.ac.cn
Source: Coatings (2079-6412); Jun2024, Vol. 14 Issue 6, p724, 14p
Database: Applied Science & Technology Source
Full text is not displayed to guests.
FullText Links:
  – Type: pdflink
Text:
  Availability: 1
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 178157253
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: The Effect of Deposition Temperature on TiN Thin Films for the Electrode Layer of 3D Capacitors Prepared by Atomic Layer Deposition.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Chen%2C+Xingyu%22">Chen, Xingyu</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AU" term="%22Zhang%2C+Jing%22">Zhang, Jing</searchLink><relatesTo>2,3</relatesTo><br /><searchLink fieldCode="AU" term="%22Gao%2C+Lingshan%22">Gao, Lingshan</searchLink><relatesTo>2</relatesTo>, <i>gaolingshan@mail.sic.ac.cn</i><br /><searchLink fieldCode="AU" term="%22Zhang%2C+Faqiang%22">Zhang, Faqiang</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Ma%2C+Mingsheng%22">Ma, Mingsheng</searchLink><relatesTo>2,3</relatesTo><br /><searchLink fieldCode="AU" term="%22Liu%2C+Zhifu%22">Liu, Zhifu</searchLink><relatesTo>1,2,3</relatesTo>, <i>gaolingshan@mail.sic.ac.cn</i>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Coatings+%282079-6412%29%22">Coatings (2079-6412)</searchLink>; Jun2024, Vol. 14 Issue 6, p724, 14p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=178157253
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.3390/coatings14060724
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 14
        StartPage: 724
    Titles:
      – TitleFull: The Effect of Deposition Temperature on TiN Thin Films for the Electrode Layer of 3D Capacitors Prepared by Atomic Layer Deposition.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Chen, Xingyu
      – PersonEntity:
          Name:
            NameFull: Zhang, Jing
      – PersonEntity:
          Name:
            NameFull: Gao, Lingshan
      – PersonEntity:
          Name:
            NameFull: Zhang, Faqiang
      – PersonEntity:
          Name:
            NameFull: Ma, Mingsheng
      – PersonEntity:
          Name:
            NameFull: Liu, Zhifu
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 06
              Text: Jun2024
              Type: published
              Y: 2024
          Identifiers:
            – Type: issn-print
              Value: 20796412
          Numbering:
            – Type: volume
              Value: 14
            – Type: issue
              Value: 6
          Titles:
            – TitleFull: Coatings (2079-6412)
              Type: main
ResultId 1