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Mixed etching-oxidation process to enhance the performance of spin-transfer torque MRAM for high-performance computing.

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Bibliographic Details
Title: Mixed etching-oxidation process to enhance the performance of spin-transfer torque MRAM for high-performance computing.
Authors: Chen, Kuan-Ming1, Lo, Chiao-Yun2, Chiu, Shih-Ching2, Su, Yi-Hui2, Chang, Yao-Jen2, Chen, Guan-Long2, Lee, Hsin-Han2, Huang, Xin-Yo2, Shih, Cheng-Yi2, Wang, Chih-Yao2, Wang, I-Jung2, Yang, Shan-Yi2, Hsin, Yu-Chen2, Wei, Jeng-Hua2, Sheu, Shyh-Shyuan2, Lo, Wei-Chung2, Chang, Shih-Chieh2, Tseng, Yuan-Chieh1, yctseng1978@nycu.edu.tw
Source: Applied Physics Letters; 7/1/2024, Vol. 125 Issue 1, p1-5, 5p
Database: Applied Science & Technology Source
Description
ISSN:00036951
DOI:10.1063/5.0217921