Direct In‐ and Out‐of‐Plane Writing of Metals on Insulators by Electron‐Beam‐Enabled, Confined Electrodeposition with Submicrometer Feature Size.
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| Title: | Direct In‐ and Out‐of‐Plane Writing of Metals on Insulators by Electron‐Beam‐Enabled, Confined Electrodeposition with Submicrometer Feature Size. |
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| Authors: | Nydegger, Mirco1, Wang, Zhu‐Jun2,3, Willinger, Marc Georg2,4, Spolenak, Ralph1, ralph.spolenak@mat.ethz.ch, Reiser, Alain1,5 |
| Source: | Small Methods; Jul2024, Vol. 8 Issue 7, p1-8, 8p |
| Database: | Applied Science & Technology Source |
| ISSN: | 23669608 |
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| DOI: | 10.1002/smtd.202301247 |