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High-Quality 4H-SiC Homogeneous Epitaxy via Homemade Horizontal Hot-Wall Reactor.

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Bibliographic Details
Title: High-Quality 4H-SiC Homogeneous Epitaxy via Homemade Horizontal Hot-Wall Reactor.
Authors: Gong, Xiaoliang1,2, gongxl@cs48.comxietl@hn.cs48.com, Xie, Tianle2, hufan@hn.cs48.com, Hu, Fan2, liping@hn.cs48.com, Li, Ping2, basai@hn.cs48.com, Ba, Sai2, Wang, Liancheng1, liancheng_wang@csu.edu.cn, Zhu, Wenhui1, zhuwenhui@csu.edu.cn
Source: Coatings (2079-6412); Jul2024, Vol. 14 Issue 7, p911, 11p
Database: Applied Science & Technology Source
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ISSN:20796412
DOI:10.3390/coatings14070911