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32‐3: Heterogeneous Resource Constrained Reinforcement Learning Photolithography Scheduler with Heterogeneous Graph Attention Network.

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Title: 32‐3: Heterogeneous Resource Constrained Reinforcement Learning Photolithography Scheduler with Heterogeneous Graph Attention Network.
Authors: Qu, Shuhui1, Yazdani, Kasra1, Lee, Janghwan1
Source: SID Symposium Digest of Technical Papers; Jun2024, Vol. 55 Issue 1, p417-420, 4p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 178715360
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PubType: Academic Journal
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  Data: 32‐3: Heterogeneous Resource Constrained Reinforcement Learning Photolithography Scheduler with Heterogeneous Graph Attention Network.
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  Data: <searchLink fieldCode="JN" term="%22SID+Symposium+Digest+of+Technical+Papers%22">SID Symposium Digest of Technical Papers</searchLink>; Jun2024, Vol. 55 Issue 1, p417-420, 4p
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      – Type: doi
        Value: 10.1002/sdtp.17546
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      – Code: eng
        Text: English
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        PageCount: 4
        StartPage: 417
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      – TitleFull: 32‐3: Heterogeneous Resource Constrained Reinforcement Learning Photolithography Scheduler with Heterogeneous Graph Attention Network.
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            NameFull: Qu, Shuhui
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            NameFull: Yazdani, Kasra
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            – D: 01
              M: 06
              Text: Jun2024
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              Y: 2024
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