32‐3: Heterogeneous Resource Constrained Reinforcement Learning Photolithography Scheduler with Heterogeneous Graph Attention Network.

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Bibliographic Details
Title:	32‐3: Heterogeneous Resource Constrained Reinforcement Learning Photolithography Scheduler with Heterogeneous Graph Attention Network.
Authors:	Qu, Shuhui¹, Yazdani, Kasra¹, Lee, Janghwan¹
Source:	SID Symposium Digest of Technical Papers; Jun2024, Vol. 55 Issue 1, p417-420, 4p
Database:	Applied Science & Technology Source

Description
ISSN:	0097966X
DOI:	10.1002/sdtp.17546