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Eco‐friendly glass wet etching for MEMS application: A review.

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Bibliographic Details
Title: Eco‐friendly glass wet etching for MEMS application: A review.
Authors: Choi, Kyeonggon1,2, Kim, Seung‐Wook1, Lee, Jae‐Hyoung3, Chu, Baojin4, Jeong, Dae‐Yong1, dyjeong@inha.ac.kr
Source: Journal of the American Ceramic Society; Oct2024, Vol. 107 Issue 10, p6497-6515, 19p
Database: Applied Science & Technology Source
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ISSN:00027820
DOI:10.1111/jace.19961