Choi, K., Kim, S., Lee, J., Chu, B., & Jeong, D. (2024). Eco‐friendly glass wet etching for MEMS application: A review. Journal of the American Ceramic Society, 107(10), 6497. https://doi.org/10.1111/jace.19961
Chicago Style (17th ed.) CitationChoi, Kyeonggon, Seung‐Wook Kim, Jae‐Hyoung Lee, Baojin Chu, and Dae‐Yong Jeong. "Eco‐friendly Glass Wet Etching for MEMS Application: A Review." Journal of the American Ceramic Society 107, no. 10 (2024): 6497. https://doi.org/10.1111/jace.19961.
MLA (9th ed.) CitationChoi, Kyeonggon, et al. "Eco‐friendly Glass Wet Etching for MEMS Application: A Review." Journal of the American Ceramic Society, vol. 107, no. 10, 2024, p. 6497, https://doi.org/10.1111/jace.19961.
Warning: These citations may not always be 100% accurate.