View in EDS HTML Full Text PDF Full Text

Eco‐friendly glass wet etching for MEMS application: A review.

Saved in:
Bibliographic Details
Title: Eco‐friendly glass wet etching for MEMS application: A review.
Authors: Choi, Kyeonggon1,2, Kim, Seung‐Wook1, Lee, Jae‐Hyoung3, Chu, Baojin4, Jeong, Dae‐Yong1, dyjeong@inha.ac.kr
Source: Journal of the American Ceramic Society; Oct2024, Vol. 107 Issue 10, p6497-6515, 19p
Database: Applied Science & Technology Source
Full text is not displayed to guests.
FullText Links:
  – Type: pdflink
Text:
  Availability: 1
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 178813668
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: Eco‐friendly glass wet etching for MEMS application: A review.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Choi%2C+Kyeonggon%22">Choi, Kyeonggon</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AU" term="%22Kim%2C+Seung‐Wook%22">Kim, Seung‐Wook</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Lee%2C+Jae‐Hyoung%22">Lee, Jae‐Hyoung</searchLink><relatesTo>3</relatesTo><br /><searchLink fieldCode="AU" term="%22Chu%2C+Baojin%22">Chu, Baojin</searchLink><relatesTo>4</relatesTo><br /><searchLink fieldCode="AU" term="%22Jeong%2C+Dae‐Yong%22">Jeong, Dae‐Yong</searchLink><relatesTo>1</relatesTo>, <i>dyjeong@inha.ac.kr</i>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Journal+of+the+American+Ceramic+Society%22">Journal of the American Ceramic Society</searchLink>; Oct2024, Vol. 107 Issue 10, p6497-6515, 19p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=178813668
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1111/jace.19961
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 19
        StartPage: 6497
    Titles:
      – TitleFull: Eco‐friendly glass wet etching for MEMS application: A review.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Choi, Kyeonggon
      – PersonEntity:
          Name:
            NameFull: Kim, Seung‐Wook
      – PersonEntity:
          Name:
            NameFull: Lee, Jae‐Hyoung
      – PersonEntity:
          Name:
            NameFull: Chu, Baojin
      – PersonEntity:
          Name:
            NameFull: Jeong, Dae‐Yong
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 10
              Text: Oct2024
              Type: published
              Y: 2024
          Identifiers:
            – Type: issn-print
              Value: 00027820
          Numbering:
            – Type: volume
              Value: 107
            – Type: issue
              Value: 10
          Titles:
            – TitleFull: Journal of the American Ceramic Society
              Type: main
ResultId 1