Eco‐friendly glass wet etching for MEMS application: A review.
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| Title: | Eco‐friendly glass wet etching for MEMS application: A review. |
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| Authors: | Choi, Kyeonggon1,2, Kim, Seung‐Wook1, Lee, Jae‐Hyoung3, Chu, Baojin4, Jeong, Dae‐Yong1, dyjeong@inha.ac.kr |
| Source: | Journal of the American Ceramic Society; Oct2024, Vol. 107 Issue 10, p6497-6515, 19p |
| Database: | Applied Science & Technology Source |
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