Low-Energy Au Ion Beam Implantation in the Optical, Structural, and Surface Properties of RF-Sputtered WO3 Thin Films.
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| Title: | Low-Energy Au Ion Beam Implantation in the Optical, Structural, and Surface Properties of RF-Sputtered WO3 Thin Films. |
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| Authors: | Deepika1, Kumar, Rajesh1, kumarrrpi@gmail.com |
| Source: | Journal of Electronic Materials; Oct2024, Vol. 53 Issue 10, p5937-5951, 15p |
| Database: | Applied Science & Technology Source |
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