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Low-Energy Au Ion Beam Implantation in the Optical, Structural, and Surface Properties of RF-Sputtered WO3 Thin Films.

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Bibliographic Details
Title: Low-Energy Au Ion Beam Implantation in the Optical, Structural, and Surface Properties of RF-Sputtered WO3 Thin Films.
Authors: Deepika1, Kumar, Rajesh1, kumarrrpi@gmail.com
Source: Journal of Electronic Materials; Oct2024, Vol. 53 Issue 10, p5937-5951, 15p
Database: Applied Science & Technology Source
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Description
ISSN:03615235
DOI:10.1007/s11664-024-11162-1