POSS and PAG Dual-Containing Chemically Amplified Photoresists by RAFT Polymerization for Enhanced Thermal Performance and Acid Diffusion Inhibition.
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| Title: | POSS and PAG Dual-Containing Chemically Amplified Photoresists by RAFT Polymerization for Enhanced Thermal Performance and Acid Diffusion Inhibition. |
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| Authors: | Yu, Haimeng1, Liu, Shaoshuai1, Fu, Haiyan1, Cui, Zepeng1, Zhang, Liangshun1, Tian, Jia1, tianjia@ecust.edu.cn |
| Source: | Applied Sciences (2076-3417); Sep2024, Vol. 14 Issue 17, p7722, 15p |
| Database: | Applied Science & Technology Source |
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| Header | DbId: aci DbLabel: Applied Science & Technology Source An: 179650245 AccessLevel: 2 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=179650245 |
| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.3390/app14177722 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 15 StartPage: 7722 Titles: – TitleFull: POSS and PAG Dual-Containing Chemically Amplified Photoresists by RAFT Polymerization for Enhanced Thermal Performance and Acid Diffusion Inhibition. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Yu, Haimeng – PersonEntity: Name: NameFull: Liu, Shaoshuai – PersonEntity: Name: NameFull: Fu, Haiyan – PersonEntity: Name: NameFull: Cui, Zepeng – PersonEntity: Name: NameFull: Zhang, Liangshun – PersonEntity: Name: NameFull: Tian, Jia IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 09 Text: Sep2024 Type: published Y: 2024 Identifiers: – Type: issn-print Value: 20763417 Numbering: – Type: volume Value: 14 – Type: issue Value: 17 Titles: – TitleFull: Applied Sciences (2076-3417) Type: main |
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