Design of an atomic layer deposition system with in situ reflection high energy electron diffraction.
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| Title: | Design of an atomic layer deposition system with in situ reflection high energy electron diffraction. |
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| Authors: | Howzen, Alexandra J.1, Caspar, Justin2, Oztekin, Alparslan2, Strandwitz, Nicholas C.1, nis212@lehigh.edu |
| Source: | Review of Scientific Instruments; Nov2024, Vol. 95 Issue 11, p1-11, 11p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00346748 |
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| DOI: | 10.1063/5.0206286 |
