Effect of Al precursor's properties on interactions with self-assembled monolayers for area selective deposition.
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| Title: | Effect of Al precursor's properties on interactions with self-assembled monolayers for area selective deposition. |
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| Authors: | Gu, Eryan1, Yan, Jin1, Li, Boxuan2, Zhou, Huilong2, Lu, Zhuhui2, Wen, Yanwei2, Cao, Kun1, kuncao@hust.edu.cn, Chen, Rong1, rongchen@mail.hust.edu.cn |
| Source: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Dec2024, Vol. 42 Issue 6, p1-10, 10p |
| Database: | Applied Science & Technology Source |
| ISSN: | 07342101 |
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| DOI: | 10.1116/6.0003847 |
