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Effect of Al precursor's properties on interactions with self-assembled monolayers for area selective deposition.

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Title: Effect of Al precursor's properties on interactions with self-assembled monolayers for area selective deposition.
Authors: Gu, Eryan1, Yan, Jin1, Li, Boxuan2, Zhou, Huilong2, Lu, Zhuhui2, Wen, Yanwei2, Cao, Kun1, kuncao@hust.edu.cn, Chen, Rong1, rongchen@mail.hust.edu.cn
Source: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Dec2024, Vol. 42 Issue 6, p1-10, 10p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 181207930
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Effect of Al precursor's properties on interactions with self-assembled monolayers for area selective deposition.
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  Data: <searchLink fieldCode="AU" term="%22Gu%2C+Eryan%22">Gu, Eryan</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Yan%2C+Jin%22">Yan, Jin</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Li%2C+Boxuan%22">Li, Boxuan</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Zhou%2C+Huilong%22">Zhou, Huilong</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Lu%2C+Zhuhui%22">Lu, Zhuhui</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Wen%2C+Yanwei%22">Wen, Yanwei</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Cao%2C+Kun%22">Cao, Kun</searchLink><relatesTo>1</relatesTo>, <i>kuncao@hust.edu.cn</i><br /><searchLink fieldCode="AU" term="%22Chen%2C+Rong%22">Chen, Rong</searchLink><relatesTo>1</relatesTo>, <i>rongchen@mail.hust.edu.cn</i>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Vacuum+Science+%26+Technology%3A+Part+A-Vacuums%2C+Surfaces+%26+Films%22">Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films</searchLink>; Dec2024, Vol. 42 Issue 6, p1-10, 10p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=181207930
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1116/6.0003847
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 10
        StartPage: 1
    Titles:
      – TitleFull: Effect of Al precursor's properties on interactions with self-assembled monolayers for area selective deposition.
        Type: main
  BibRelationships:
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      – PersonEntity:
          Name:
            NameFull: Gu, Eryan
      – PersonEntity:
          Name:
            NameFull: Yan, Jin
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          Name:
            NameFull: Li, Boxuan
      – PersonEntity:
          Name:
            NameFull: Zhou, Huilong
      – PersonEntity:
          Name:
            NameFull: Lu, Zhuhui
      – PersonEntity:
          Name:
            NameFull: Wen, Yanwei
      – PersonEntity:
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            NameFull: Cao, Kun
      – PersonEntity:
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            NameFull: Chen, Rong
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          Dates:
            – D: 01
              M: 12
              Text: Dec2024
              Type: published
              Y: 2024
          Identifiers:
            – Type: issn-print
              Value: 07342101
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            – Type: volume
              Value: 42
            – Type: issue
              Value: 6
          Titles:
            – TitleFull: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films
              Type: main
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