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Eco-friendly smart design strategy for integrated semiconductor processes.

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Bibliographic Details
Title: Eco-friendly smart design strategy for integrated semiconductor processes.
Authors: Lin, Chih-Yao1, lincy@thu.edu.tw, Chen, Pin-Ru1
Source: Journal of Intelligent Manufacturing; Jan2025, Vol. 36 Issue 1, p243-257, 15p
Database: Applied Science & Technology Source
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Description
ISSN:09565515
DOI:10.1007/s10845-023-02226-w