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Eco-friendly smart design strategy for integrated semiconductor processes.

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Title: Eco-friendly smart design strategy for integrated semiconductor processes.
Authors: Lin, Chih-Yao1, lincy@thu.edu.tw, Chen, Pin-Ru1
Source: Journal of Intelligent Manufacturing; Jan2025, Vol. 36 Issue 1, p243-257, 15p
Database: Applied Science & Technology Source
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PubType: Academic Journal
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  Data: Eco-friendly smart design strategy for integrated semiconductor processes.
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Intelligent+Manufacturing%22">Journal of Intelligent Manufacturing</searchLink>; Jan2025, Vol. 36 Issue 1, p243-257, 15p
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        Value: 10.1007/s10845-023-02226-w
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        Text: English
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        PageCount: 15
        StartPage: 243
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              Text: Jan2025
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              Y: 2025
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