Electrical properties of ScN thin films controlled by defect engineering using oxygen ion implantation.
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| Title: | Electrical properties of ScN thin films controlled by defect engineering using oxygen ion implantation. |
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| Authors: | Poterie, Charlotte1, Bouteiller, Hugo1, Burcea, Razvan1,2, Dubois, Sylvain1, Eklund, Per3,4, Le Febvrier, Arnaud3,4, arnaud.le.febvrier@liu.se, Cabioc'h, Thierry1, Barbot, Jean-François1, jean.francois.barbot@univ-poitiers.fr |
| Source: | Journal of Applied Physics; 1/7/2025, Vol. 137 Issue 1, p1-11, 11p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/5.0230961 |
