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Electrical properties of ScN thin films controlled by defect engineering using oxygen ion implantation.

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Title: Electrical properties of ScN thin films controlled by defect engineering using oxygen ion implantation.
Authors: Poterie, Charlotte1, Bouteiller, Hugo1, Burcea, Razvan1,2, Dubois, Sylvain1, Eklund, Per3,4, Le Febvrier, Arnaud3,4, arnaud.le.febvrier@liu.se, Cabioc'h, Thierry1, Barbot, Jean-François1, jean.francois.barbot@univ-poitiers.fr
Source: Journal of Applied Physics; 1/7/2025, Vol. 137 Issue 1, p1-11, 11p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 182103049
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Electrical properties of ScN thin films controlled by defect engineering using oxygen ion implantation.
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PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=182103049
RecordInfo BibRecord:
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      – Type: doi
        Value: 10.1063/5.0230961
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      – Code: eng
        Text: English
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      Pagination:
        PageCount: 11
        StartPage: 1
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      – TitleFull: Electrical properties of ScN thin films controlled by defect engineering using oxygen ion implantation.
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            NameFull: Poterie, Charlotte
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            NameFull: Bouteiller, Hugo
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            NameFull: Burcea, Razvan
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            NameFull: Dubois, Sylvain
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            NameFull: Eklund, Per
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            NameFull: Le Febvrier, Arnaud
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            NameFull: Cabioc'h, Thierry
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            NameFull: Barbot, Jean-François
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            – D: 07
              M: 01
              Text: 1/7/2025
              Type: published
              Y: 2025
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              Value: 137
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            – TitleFull: Journal of Applied Physics
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