Growth and characterization of SiGe/Si superlattice for vertically stacked DRAM.
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| Title: | Growth and characterization of SiGe/Si superlattice for vertically stacked DRAM. |
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| Authors: | Wang, Hailing1, Wang, Xiangsheng1, Song, Yanpeng1, Liu, Xiaomeng1, Zhang, Ying1, Liu, Xinyou1, Wang, Guilei1, guilei.wang@bjsamt.org.cn, Zhao, Chao1, chao.zhao@bjsamt.org.cn |
| Source: | Journal of Materials Science: Materials in Electronics; Jan2025, Vol. 36 Issue 2, p1-11, 11p |
| Database: | Applied Science & Technology Source |
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| ISSN: | 09574522 |
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| DOI: | 10.1007/s10854-024-14167-y |
