Oxygen vacancy distribution and phase composition in scaled, Hf0.5Zr0.5O2-based ferroelectric capacitors.
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| Title: | Oxygen vacancy distribution and phase composition in scaled, Hf0.5Zr0.5O2-based ferroelectric capacitors. |
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| Authors: | Iung, T.1,2, Pérez Ramírez, L.1, Gloskovskii, A.3, Cho, C.-Yi4, Lao, M.-Y.4, De, S.4,5, Hou, T.-H4, Lubin, C.1, Gros-Jean, M.2, Barrett, N.1, nick.barrett@cea.fr |
| Source: | Applied Physics Letters; 2/10/2025, Vol. 126 Issue 6, p1-6, 6p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00036951 |
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| DOI: | 10.1063/5.0245595 |
