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Vertically Integrated Self‐Monitoring AlGaN‐Based Deep Ultraviolet Micro‐LED Array with Photodetector Via a Transparent Sapphire Substrate Toward Stable and Compact Maskless Photolithography Application.

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Bibliographic Details
Title:	Vertically Integrated Self‐Monitoring AlGaN‐Based Deep Ultraviolet Micro‐LED Array with Photodetector Via a Transparent Sapphire Substrate Toward Stable and Compact Maskless Photolithography Application.
Authors:	Yu, Huabin¹, Yao, Jikai¹, Memon, Muhammad Hunain¹, Luo, Yuanmin¹, Gao, Zhixiang¹, Luo, Dongyang¹, Wang, Rui¹, Wang, Zixun¹, Chen, Wei¹, Wang, Linjun², Li, Shuiqing³, Zheng, Jinjian³, Zhang, Jiangyong³, Liu, Sheng⁴, Sun, Haiding^1,5, haiding@ustc.edu.cn
Source:	Laser & Photonics Reviews; 1/22/2025, Vol. 19 Issue 2, p1-9, 9p
Database:	Applied Science & Technology Source

Description
ISSN:	18638880
DOI:	10.1002/lpor.202401220