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Vertically Integrated Self‐Monitoring AlGaN‐Based Deep Ultraviolet Micro‐LED Array with Photodetector Via a Transparent Sapphire Substrate Toward Stable and Compact Maskless Photolithography Application.

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Title: Vertically Integrated Self‐Monitoring AlGaN‐Based Deep Ultraviolet Micro‐LED Array with Photodetector Via a Transparent Sapphire Substrate Toward Stable and Compact Maskless Photolithography Application.
Authors: Yu, Huabin1, Yao, Jikai1, Memon, Muhammad Hunain1, Luo, Yuanmin1, Gao, Zhixiang1, Luo, Dongyang1, Wang, Rui1, Wang, Zixun1, Chen, Wei1, Wang, Linjun2, Li, Shuiqing3, Zheng, Jinjian3, Zhang, Jiangyong3, Liu, Sheng4, Sun, Haiding1,5, haiding@ustc.edu.cn
Source: Laser & Photonics Reviews; 1/22/2025, Vol. 19 Issue 2, p1-9, 9p
Database: Applied Science & Technology Source
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DbLabel: Applied Science & Technology Source
An: 183977348
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PubType: Academic Journal
PubTypeId: academicJournal
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  Data: Vertically Integrated Self‐Monitoring AlGaN‐Based Deep Ultraviolet Micro‐LED Array with Photodetector Via a Transparent Sapphire Substrate Toward Stable and Compact Maskless Photolithography Application.
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  Data: <searchLink fieldCode="JN" term="%22Laser+%26+Photonics+Reviews%22">Laser & Photonics Reviews</searchLink>; 1/22/2025, Vol. 19 Issue 2, p1-9, 9p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=183977348
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        Value: 10.1002/lpor.202401220
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        Text: English
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        PageCount: 9
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      – TitleFull: Vertically Integrated Self‐Monitoring AlGaN‐Based Deep Ultraviolet Micro‐LED Array with Photodetector Via a Transparent Sapphire Substrate Toward Stable and Compact Maskless Photolithography Application.
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              Text: 1/22/2025
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