Optimizing process of aluminum-doped zinc oxide thin films by modifying fabrication atmospheres to apply on CO gas sensing.
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| Title: | Optimizing process of aluminum-doped zinc oxide thin films by modifying fabrication atmospheres to apply on CO gas sensing. |
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| Authors: | Lin, Yen-Sheng1, yslin@isu.edu.tw, Lin, Fang-Jun1 |
| Source: | Journal of Materials Science: Materials in Electronics; Apr2025, Vol. 36 Issue 10, p1-15, 15p |
| Database: | Applied Science & Technology Source |
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| ISSN: | 09574522 |
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| DOI: | 10.1007/s10854-025-14656-8 |