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Diffusion Transport of Target Material for a Planar Asymmetrical Hollow Cathode Sputtering System.

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Bibliographic Details
Title:	Diffusion Transport of Target Material for a Planar Asymmetrical Hollow Cathode Sputtering System.
Authors:	Butnyakov, D. A.¹, butnyakovda@yandex.ru, Sorokin, I. A.^1,2, iasorokin@mail.ru, Kolodko, D. V.^1,2, dobrynya_kol@mail.ru
Source:	Plasma Chemistry & Plasma Processing; May2025, Vol. 45 Issue 3, p1029-1044, 16p
Database:	Applied Science & Technology Source
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Description
ISSN:	02724324
DOI:	10.1007/s11090-025-10550-7