Modeling and Characterization of Hybrid Thermo-Piezoelectric Cantilevers: Modeling and Characterization of Hybrid Thermo-Piezoelectric Cantilevers: E. Herth et al.
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| Title: | Modeling and Characterization of Hybrid Thermo-Piezoelectric Cantilevers: Modeling and Characterization of Hybrid Thermo-Piezoelectric Cantilevers: E. Herth et al. |
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| Authors: | Herth, Etienne1, etienne.herth@cnrs.fr, Cavalliers, Bruno2, Salhi, Sarra1,3, Kardous, Faten3, Fall, Dame2, Rousseau, Lionel4, Valbin, Laurie4, Lardet-Vieudrin, Franck2 |
| Source: | Journal of Electronic Materials; May2025, Vol. 54 Issue 5, p3760-3772, 13p |
| Database: | Applied Science & Technology Source |
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| ISSN: | 03615235 |
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| DOI: | 10.1007/s11664-025-11836-4 |
